상세 보기
A Study on the Incorporation Behavior of In, Ga, and Zn in IGZO Thin Films according to Sub-Cycle Ratio during Thermal Atomic Layer Deposition
A Study on the Incorporation Behavior of In, Ga, and Zn in IGZO Thin Films according to Sub-Cycle Ratio during Thermal Atomic Layer Deposition
- 제목
- A Study on the Incorporation Behavior of In, Ga, and Zn in IGZO Thin Films according to Sub-Cycle Ratio during Thermal Atomic Layer Deposition
- 제목 (타언어)
- A Study on the Incorporation Behavior of In, Ga, and Zn in IGZO Thin Films according to Sub-Cycle Ratio during Thermal Atomic Layer Deposition
- 저자
- In-Hwan Baek
- 학회명
- 한국반도체학술대회
- 개최지
- 경주 화백컨벤션센터
- 학회 개최일
- 2024-01-24 ~ 2024-01-26