Investigation of Atomic Layer Deposition of Indium-oxide Using DBADMIn Precursor for Thin Film Transistor Active Layer

제목
Investigation of Atomic Layer Deposition of Indium-oxide Using DBADMIn Precursor for Thin Film Transistor Active Layer
저자
In-Hwan Baek
학회명
NCC 2025
학회 개최일
2025-01-16 ~ 2025-01-17