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The Effect of C, H and O Elements on Etching Ru Thin Films Using Inductively Coupled Plasma
- 제목
- The Effect of C, H and O Elements on Etching Ru Thin Films Using Inductively Coupled Plasma
- 저자
- CHUNG CHEE WON
- 학회명
- International Conference on Chemical, Metallurgy and Material Science Engineering (CMMSE-2015)
- 개최지
- Pattaya
- 학회 개최일
- 2015-08-10 ~ 2015-08-11