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Correlation between mask slope and redeposition in Cu dry etching
- 제목
- Correlation between mask slope and redeposition in Cu dry etching
- 저자
- CHUNG CHEE WON
- 학회명
- The 31th Korean Conference on Semiconductors
- 개최지
- 경주화백컨벤션센터
- 학회 개최일
- 2024-01-24 ~ 2024-01-26