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Inductively Coupled Plasma Reactive Ion Etching of Nanometer-Size Patterned Magnetic Tunnel Junction Stacks using C, H, O Containing Gases
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- Inductively Coupled Plasma Reactive Ion Etching of Nanometer-Size Patterned Magnetic Tunnel Junction Stacks using C, H, O Containing Gases
- 저자
- CHUNG CHEE WON
- 학회명
- 제22회 한국반도체 학술대회
- 개최지
- 인천송도컨벤시아
- 학회 개최일
- 2015-02-10 ~ 2015-02-12