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Layer-by-layer etching of copper thin films using organic chelator/O2 gas and Ar plasma
- 제목
- Layer-by-layer etching of copper thin films using organic chelator/O2 gas and Ar plasma
- 저자
- CHUNG CHEE WON
- 학회명
- Korean International semiconductor conference on manufacturing technology 2022
- 개최지
- Busan, Paradise Hotel
- 학회 개최일
- 2022-11-13 ~ 2022-11-16