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Inductively Coupled Plasma Reactive Ion Etching of Titanium Nitride Thin Films in a Cl2/Ar Plasma

제목
Inductively Coupled Plasma Reactive Ion Etching of Titanium Nitride Thin Films in a Cl2/Ar Plasma
저자
CHUNG CHEE WON
학회명
IUMRS-ICA 2006

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