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High density plasma reactive ion etching of Ru thin films using non-corrosive gas mixture
- 제목
- High density plasma reactive ion etching of Ru thin films using non-corrosive gas mixture
- 저자
- CHUNG CHEE WON
- 학회명
- International Conference on Microelectonics and Plasma Technology 2014
- 개최지
- 군산컨벤션센터
- 학회 개최일
- 2014-07-08 ~ 2014-07-11