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Effect of the substrate temperature on the characteristics of CIGS thin films by RF magnetron sputtering using a Cu(In1-xGax)Se2 single target
- 제목
- Effect of the substrate temperature on the characteristics of CIGS thin films by RF magnetron sputtering using a Cu(In1-xGax)Se2 single target
- 저자
- CHUNG CHEE WON
- 학회명
- 제42회 한국진공학회 동계학술대회
- 개최지
- 보광휘닉스파크
- 학회 개최일
- 2012-02-08 ~ 2012-02-10