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Investigation on Etch Characteristics of FePt Thin Films Using a H2O/Ar Plasma
- 제목
- Investigation on Etch Characteristics of FePt Thin Films Using a H2O/Ar Plasma
- 저자
- CHUNG CHEE WON
- 학회명
- The 4th International Conference on Microelectronics and Plasma Technology
- 개최지
- Jeju
- 학회 개최일
- 2012-07-04 ~ 2012-07-06