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Effect of H2O Gas on Etch Characteristics of Magnetic Tunnel Junction Stacks Using a H2O/CH3OH Plasma
- 제목
- Effect of H2O Gas on Etch Characteristics of Magnetic Tunnel Junction Stacks Using a H2O/CH3OH Plasma
- 저자
- CHUNG CHEE WON
- 학회명
- 35th International Symposium on Dry Process
- 개최지
- Jeju
- 학회 개최일
- 2013-08-29 ~ 2013-08-30