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Inductively Coupled plasma Reactive Ion Etching of IrMn Magnetic Thin Films in a CH4/Ar gas
- 제목
- Inductively Coupled plasma Reactive Ion Etching of IrMn Magnetic Thin Films in a CH4/Ar gas
- 저자
- CHUNG CHEE WON
- 학회명
- The third international conference on microelectronics and plasma technology
- 개최지
- 대련
- 학회 개최일
- 2011-07-04 ~ 2011-07-07