상세 보기
High Density Plasma Etching of Magnetic Tunnel Junction Stacks with Nanometer-Sized Pattern in a Cl2/Ar Gas Mix
- 제목
- High Density Plasma Etching of Magnetic Tunnel Junction Stacks with Nanometer-Sized Pattern in a Cl2/Ar Gas Mix
- 저자
- CHUNG CHEE WON
- 학회명
- The 1st International Conference on Microelectronics and Plasma Technology
- 개최지
- 라마다 프라자 제주 호텔
- 학회 개최일
- 2008-08-18 ~ 2008-08-20