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Quantitative Analysis of Incorporation Behavior of In, Ga, and Zn in In-rich IGZO Thin Films According to Sub-cycle Sequence during Thermal Atomic Layer Deposition
- 제목
- Quantitative Analysis of Incorporation Behavior of In, Ga, and Zn in In-rich IGZO Thin Films According to Sub-cycle Sequence during Thermal Atomic Layer Deposition
- 저자
- In-Hwan Baek
- 학회명
- 2023 International Workshop on dielectric thin film for future electron devices
- 개최지
- Kanazawa Chamber of Commerce and Industry
- 학회 개최일
- 2023-10-23 ~ 2023-10-25