화학 용액 증착법에 의하여 증착된 Bi3.25La0.75Ti3O12 박막에 대한 결정화 온도의 영향

초록

Ferroelectric Bi3.25La0.75Ti3O12 thin films were prepared using bismuth acetate, lanthanum acetate and titanium (diisopropoxide)bis(acetylacetonate) as precursors by chemical solution deposition. The BLT thin films were annealed as a function of annealing temperature in a furnace. The structure and the surface morphology of the thin films were characterized by x-ray diffraction and field emission scanning electron microscopy. The electrical measurements were performed using a RT66A. The grain size of the thin films increased with increasing furnace annealing temperature. The remanent polarization(2Pr) and the coercive field(Ec) of the thin film annealed at 650℃ were 10 μC/㎠ and 68.75 kV/㎝. The thin film annealed at 700℃ were 17 μC/㎠ and 75 kV/㎝.