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Etch Characteristics of CoFeB Magnetic Thin Films Using High Density Plasma of a H2O/CH4/Ar Gas Mixture
- 제목
- Etch Characteristics of CoFeB Magnetic Thin Films Using High Density Plasma of a H2O/CH4/Ar Gas Mixture
- 저자
- CHUNG CHEE WON
- 학회명
- IUMRS-ICA 2012
- 학회 개최일
- 2012-08-27 ~ 2012-08-31