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The Effect on Electrical Property of Etched Magnetic Tunnel Junction Stack in Cl2/Ar and HBr/Ar Plasma
- 제목
- The Effect on Electrical Property of Etched Magnetic Tunnel Junction Stack in Cl2/Ar and HBr/Ar Plasma
- 저자
- CHUNG CHEE WON
- 학회명
- The 1st International Symposium on Advanced Magnetic Materials