The Effect on Electrical Property of Etched Magnetic Tunnel Junction Stack in Cl2/Ar and HBr/Ar Plasma

제목
The Effect on Electrical Property of Etched Magnetic Tunnel Junction Stack in Cl2/Ar and HBr/Ar Plasma
저자
CHUNG CHEE WON
학회명
The 1st International Symposium on Advanced Magnetic Materials