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Effect of mask thickness on redeposition in etch profile of Cu dry etching
- 제목
- Effect of mask thickness on redeposition in etch profile of Cu dry etching
- 저자
- CHUNG CHEE WON
- 학회명
- Korean International Semiconductor Conference on Manufacturing Technology 2023
- 개최지
- Busan, Paradise Hotel
- 학회 개최일
- 2023-11-19 ~ 2023-11-23