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Etch Characteristics of TiN Thin Films Masked with Nanometer-Sized Patterns
- 제목
- Etch Characteristics of TiN Thin Films Masked with Nanometer-Sized Patterns
- 저자
- CHUNG CHEE WON
- 학회명
- The 3rd USA International Conference on Surfaces, Coatings and NanoStructured Materials
- 개최지
- The University of Texas at Arlington
- 학회 개최일
- 2016-05-18 ~ 2016-05-20