Etch Characteristics of Nickel Oxide and Nickel Using Inductively Coupled Plasma Reactive Ion Etching for Oxide Resistive Random Access Memory(OxRRAM) Application

제목
Etch Characteristics of Nickel Oxide and Nickel Using Inductively Coupled Plasma Reactive Ion Etching for Oxide Resistive Random Access Memory(OxRRAM) Application
저자
CHUNG CHEE WON
학회명
Proceedings of International Symposium on Dry Process