상세 보기
Nanometer-Scale Etching of Cobalt Thin Films Using High Density Plasma of Acetone/Ar
- 제목
- Nanometer-Scale Etching of Cobalt Thin Films Using High Density Plasma of Acetone/Ar
- 저자
- CHUNG CHEE WON
- 학회명
- The 31th Korean Conference on Semiconductors
- 개최지
- 경주화백컨벤션센터
- 학회 개최일
- 2024-01-24 ~ 2024-01-26