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Redeposition-Free Copper Etching Using Organic Gas Mixtures”
- 제목
- Redeposition-Free Copper Etching Using Organic Gas Mixtures”
- 저자
- CHUNG CHEE WON
- 학회명
- The 12th International Vacuum and Surface Sciences Conference of Asia and Australia
- 개최지
- Taipei internaional convention center
- 학회 개최일
- 2024-10-13 ~ 2024-10-17