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Atomic Layer Etching of Nanometer-Scale Patterned Cu Thin Films Using Chelation with Organic Gas
- 제목
- Atomic Layer Etching of Nanometer-Scale Patterned Cu Thin Films Using Chelation with Organic Gas
- 저자
- CHUNG CHEE WON
- 학회명
- 22nd International Union of Materials Research Societies - International Conference in Asia 2021
- 개최지
- 온라인
- 학회 개최일
- 2021-10-03 ~ 2021-10-08