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Nanometer-Size Patterning of TiN Thin Films Using Inductively Coupled Plasma of Cl2/C2F6/Ar
- 제목
- Nanometer-Size Patterning of TiN Thin Films Using Inductively Coupled Plasma of Cl2/C2F6/Ar
- 저자
- CHUNG CHEE WON
- 학회명
- The 6th International Conference on Microelectronics and Plasma Technology
- 개최지
- Gyeongju, Korea
- 학회 개최일
- 2016-09-26 ~ 2016-09-29