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Effect of Non-Corrosive Gas Mixture on Etching of Nanometer-Scale Patterned Cu Thin Film Using Pulsed Modulated RF Source Plasma
- 제목
- Effect of Non-Corrosive Gas Mixture on Etching of Nanometer-Scale Patterned Cu Thin Film Using Pulsed Modulated RF Source Plasma
- 저자
- CHUNG CHEE WON
- 학회명
- 2021 Materials Research Society Spring Meeting & Exhibit
- 개최지
- 온라인
- 학회 개최일
- 2021-04-17 ~ 2021-04-23