Low-temperature growth of rutile TiO2 using a SnO2 seed layer for high-k dielectric applications in DRAM devices

제목
Low-temperature growth of rutile TiO2 using a SnO2 seed layer for high-k dielectric applications in DRAM devices
저자
In-Hwan Baek
학회명
The 40th international technical conference on circuits/systems, computers, and communications 2025
개최지
중앙대학교