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Layer-by-layer etching of copper thin films under acetylacetone/O2 gas mixture
- 제목
- Layer-by-layer etching of copper thin films under acetylacetone/O2 gas mixture
- 저자
- CHUNG CHEE WON
- 학회명
- American Vacuum Society 68th International symposium & exhibition
- 개최지
- Pittsburgh, Pennsylvania
- 학회 개최일
- 2022-11-06 ~ 2022-11-11