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Inductively Coupled Plasma Reactive Ion Etching of Nanometer-Patterned Magnetic Tunnel Junction Stack for STT-MRAM
- 제목
- Inductively Coupled Plasma Reactive Ion Etching of Nanometer-Patterned Magnetic Tunnel Junction Stack for STT-MRAM
- 저자
- CHUNG CHEE WON
- 학회명
- International Conference of The Asian Union of Magnetics Societies 2010
- 개최지
- Lotte Hotel Jeju
- 학회 개최일
- 2010-12-05 ~ 2010-12-08