Inductively Coupled Plasma Reactive Ion Etching of Nanometer-Patterned Magnetic Tunnel Junction Stack for STT-MRAM

제목
Inductively Coupled Plasma Reactive Ion Etching of Nanometer-Patterned Magnetic Tunnel Junction Stack for STT-MRAM
저자
CHUNG CHEE WON
학회명
International Conference of The Asian Union of Magnetics Societies 2010
개최지
Lotte Hotel Jeju
학회 개최일
2010-12-05 ~ 2010-12-08