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Tailoring the scavenging effect of ALD Al2O3 passivation layer via oxidant engineering for high-performance tellurium transistors

제목
Tailoring the scavenging effect of ALD Al2O3 passivation layer via oxidant engineering for high-performance tellurium transistors
저자
In-Hwan Baek
학회명
ALD/ALE 2025

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