Characteristics of Indium Zinc Oxide Thin Films Prepared by Direct Current Magnetron Sputtering For Flexible Solar Cells

초록

Indium zinc oxide (IZO) thin films are prepared on polyethylene terephthalate (PET) substrate at room temperature by direct current (dc) magnetron sputtering. The effects of process parameters on physical, electrical and optical properties of IZO films are explored. The main process parameters are dc power, deposition pressure, distance between target and sample, and sputtering gas. The target of In2O3 and ZnO composite are used in this study. The deposition of IZO thin films on substrate are performed at room temperature with heat treatment after the deposition. As the dc power increases, the transmittance gradually decreases and the resistivity slightly increases. For the variation of deposition pressure, the resistivity greatly increases and the transmittance is decreased with increasing deposition pressure. The observation of the IZO films by atomic force microscopy indicates that the microstructure and surface morphology of the films are responsible for the transmittance. The x-ray diffraction is analyzed to examine the crystalline property of IZO thin films. Finally, the relationship between the properties of IZO electrode and cell efficiency will be evaluated.