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Evolution of Etch Profile in Etching of CoFeB and IrMn Thin Films Using High Density Plasma Reactive Ion Etching
- 제목
- Evolution of Etch Profile in Etching of CoFeB and IrMn Thin Films Using High Density Plasma Reactive Ion Etching
- 저자
- CHUNG CHEE WON
- 학회명
- 10th Asia-Pacific Conference on Plasma Science and Technology (APCPST)
- 개최지
- Lotte Hotel Jeju
- 학회 개최일
- 2010-07-04 ~ 2010-07-08