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Etch Characteristics of Magnetic Tunnel Junction Stacks in a O2/Ar Plasma

제목
Etch Characteristics of Magnetic Tunnel Junction Stacks in a O2/Ar Plasma
저자
CHUNG CHEE WON
학회명
2012년 한국화학공학회 춘계학술대회
개최지
제주 ICC
학회 개최일
2012-04-25 ~ 2012-04-27

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