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Etch Characteristics of Indium Zinc Oxide Thin Films Using Inductively Coupled Plasma of a Cl2/Ar gas
- 제목
- Etch Characteristics of Indium Zinc Oxide Thin Films Using Inductively Coupled Plasma of a Cl2/Ar gas
- 저자
- CHUNG CHEE WON
- 학회명
- The 1st International Conference on Microelectronics and Plamsa Technology
- 개최지
- 라마다 프라자 제주 호텔
- 학회 개최일
- 2008-08-18 ~ 2008-08-20