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Investigation on Etch Characteristics of Magnetic Tunnel Junction Stacks with Nanometer-Sized Patterns for Magnetic Random Access Memory
- 제목
- Investigation on Etch Characteristics of Magnetic Tunnel Junction Stacks with Nanometer-Sized Patterns for Magnetic Random Access Memory
- 저자
- CHUNG CHEE WON
- 학회명
- Proceedings of International Symposium on Dry Process