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Inductively Coupled Plasma Reactive Ion Etching of Copper Thin Film using Organic Chemicals and Alcohols
- 제목
- Inductively Coupled Plasma Reactive Ion Etching of Copper Thin Film using Organic Chemicals and Alcohols
- 저자
- CHUNG CHEE WON
- 학회명
- The 66th American Vacuum Society
- 개최지
- Greater Columbus Convention Center, Columbus, Ohio
- 학회 개최일
- 2019-10-20 ~ 2019-10-25