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2018 ~ 2026
2018 2026
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전체 27건 중 11번부터 20번까지의 결과를 표시합니다.
2023
Article
High-density plasma etching of cobalt thin films using C2H5OH/O2/Ar gas mixture
- Kim, Seon Jae ;
- Jeong, Jun Won ;
- Park, Sung Yong ;
- Chung, Chee Won
- 2023-07
- Materials Science & Engineering B
- Elsevier BV
2022
Article
Effect of the addition of O2 on copper etching using high density plasma of acetylacetonate/Ar
- Park, Sung Yong ;
- Lim, Eun Taek ;
- Kim, Seung Hyun ;
- Chung, Chee Won
- 2022-12
- Materials Science in Semiconductor Processing
- Pergamon Press
Article
Nanometer-scale etching of copper thin films in high-density plasma of an ethylenediamine/acetic acid/argon gas mixture
- Lim, Eun Taek ;
- Park, Sung Yong ;
- Lee, Ji Soo ;
- Kim, Seung Hyun ;
- Chung, Chee Won
- 2022-01
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- American Institute of Physics
2021
Article
Reactivity Evaluation on Copper Etching Using Organic Chelators
- Kim, Chul Hee ;
- Lim, Eun Taek ;
- Park, Chan Ho ;
- Park, Sung Yong ;
- Lee, Ji Soo ;
- ... Chung, Chee Won ;
- ... Kim, Dong Wook
- 2021-10
- 한국재료학회지
- 한국재료학회
Article
Etch Characteristics of Copper Thin Films in Inductively Coupled Plasma of Piperidine/Ethanol/Ar Gas Mixture
- Lim, Eun Taek ;
- Lee, Ji Soo ;
- Park, Sung Yong ;
- Chung, Chee Won
- 2021-05-01
- ECS Journal of Solid State Science and Technology
- Electrochemical Society, Inc.
Article
유기 킬레이터 물질의 고밀도 플라즈마를 이용한 구리 박막의 나노미터 스케일 식각
- 이지수 ;
- 임은택 ;
- 차문환 ;
- 박성용 ;
- 정지원
- 2021-05
- 전기전자재료학회논문지
- 한국전기전자재료학회
Article
Effect of Hexafluoroisopropanol Addition on Dry Etching of Cu Thin Films Using Organic Material
- Park, Sung Yong ;
- Lim, Eun Teak ;
- Cha, Moon Hwan ;
- Lee, Ji Soo ;
- Chung, Chee Won
- 2021-03
- 한국재료학회지
- 한국재료학회
2020
Article
Inductively coupled plasma reactive ion etching of copper thin films using ethylenediamine/butanol/Ar plasma
- Cha, Moon Hwan ;
- Lim, Eun Taek ;
- Park, Sung Yong ;
- Lee, Ji Su ;
- Chung, Chee Won
- 2020-11
- Vacuum
- Pergamon Press Ltd.
Article
Etch Characteristics of Nanoscale Patterned Magnetic Tunnel Junction Stacks Using Pulse-Modulated Radio Frequency Source Plasma
- Lee, Jae Yong ;
- Lim, Eun Tack ;
- Ryu, Jin Su ;
- Choi, Jae Sang ;
- Chung, Chee Won
- 2020-08
- Journal of Nanoscience and Nanotechnology
- American Scientific Publishers
Article
Cyclic etching of copper thin films using HBr and Ar gases
- Lim, Eun Taek ;
- Cha, Moon Hwan ;
- Park, Sung Yong ;
- Lee, Ji Su ;
- Chung, Chee Won
- 2020-07
- Journal of Vacuum Science and Technology A
- American Institute of Physics